Nanofabrication Equipment 

 

Lithography

• MicroWriter ML3 Pro

• UV Exposure Station and Aligner

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Metrology

Electrical

• Probe Station

Optical

• Ellipsometers (UV-NIR and IR)

• NIR-UV-VIS Spectrophotometer

• Near Field Scanning Optical Microscope

• Optical Microscope

• Optical Profilometer

Electron Beam

• Scanning Electron Microscope

Scan Probe 

• Atomic Force Microscope (AFM)

• Contact Profilometer

• Near Field Scanning Optical Microscope

X-Ray

• Diffractometer w/General Area Detector (2D XRD)

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Processing

• Chemical Hoods

• Denton Plasma Coating

• Hot Plate Station

• Ovens

• Plasma Asher

• Plasma Etching (Deep Reactive Ion Etching)

• Rapid Thermal Processing & Annealing (RTA)

• Wedge Bonder

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 Deposition 

• Dual Chamber Sputterer

• E-Beam Evaporator